Научная программа

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Oral Presentations | Posters Download in Microwoft Word format (.doc, 300 KB) Monday, October 1st, 2012 9.00 — Registration & Accommodation 13.00-14.00 Lunch Conference Hall Special Session. Presentations of Hi-Tech Companies 16.00 S1-01 SemiTEq technological equipment for nanoelectronics . S.I. Petrov1, A.N. Alexeev1, D.M. Krasovitsky2, V.P. Chaly2. 1. SemiTEq JSC, Saint-Petersburg, Russia. 2. Svetlana-Rost JSC,Continue Reading

Oral Presentations | Posters Monday, October 5th, 2009 9.00 — …Registration & Accommodation 13.00 — 14.00 Lunch Conference hall Special Session. Presentations of Hi-Tech Companies 14.30 S-00/1 Milestones of analytical FE-SEM technology — Zeiss Merlin System. Uwe Anton Schubert, Carl Zeiss NTS GmbH, Germany. 15.00 S-00/2 Electron beam lithography tools for nanoelectronic devices.Continue Reading