Scope:
Physics of micro- and nanodevices:
- Scaling challenges and opportunities for nanodevices and ICs
- Nanoscale transistors: CMOS FET, TFET, FeFET, SET, molecular transistors and switches, etc.
- Integrated memory devices: DRAM, ReRAM, FeRAM
- Devices with 1D and 2D channels
- Carbon micro- and nanoelectronics
- Devices for UHF electronics
- Solid state devices for THz generation and detection
- Magnetic micro- and nanostructures, spintronic devices
- Forthcoming devices for neuromorphic systems
- Devices for cryoelectronics
- Devices and nanostructures for optoelectronics, photonics
- Sensors, micro- and nanoelectromechanical systems (MEMS, NEMS, BioMEMS)
- Modeling and simulation of nanoelectronics devices
Extended session. Physics of surfaces and interfaces:
- Dynamics and self-assembly effects on surfaces
- Phase transformations on surfaces and at interfaces
- Surface diffusion and film growth
- Electronic and optical properties of surfaces
- Physics of atomic clusters on surfaces and interlayers at interfaces
- Chemical reactions on surfaces and at interfaces
- New experimental methods for surface investigation
Materials and heterostructures for micro-, optoelectronics, and power electronics:
- Si, SOI, GOI, SiGe/Si, AIIIBV, AIIBVI, SiC, beta-Ga2O3
- Diamond heterostructures
- High-k and low-k dielectrics
- Materials for ULSI interconnection systems
- 1D and 2D materials
- Magnetic materials, nanomagnetics
- Materials for optoelectronics and photovoltaic, metamaterials
- Nanocomposite materials for electronic devices
Physics of technological processes and advanced equipment for micro- and nanoelectronics:
- Lithography: immersion, EUV, electron-beam and ion-beam lithography, nanoimprint
- Front-end of line (FEOL) processes for ICs manufacturing
- Back-end of line (BEOL) processes for ICs manufacturing
- 3D integration technologies
- Technologies for nanoelectronics based on 2D materials (graphene, MoS2, WS2, etc.)
- Technologies for 1D structures manufacturing (nanowires, nanosheets, nanotubes)
- Technologies for MEMS, NEMS, and BioMEMS
- Technologies for superconducting devices
Metrology:
- In situ technology processes monitoring and control (end-point detection, process smart sensors)
- Inspections, metrology, and characterization of micro- and nanostructures
Extended session. Quantum technologies:
- Quantum computing: theory and experiments
- Quantum measurements
- Quantum algorithms
- Quantum communications
- Quantum sensors