Physics of micro- and nanodevices:

  • Scaling challenges and opportunities for nanodevices
  • Nanoscale transistors: CMOS FET, TFET, SET, molecular transistors, molecular switches, etc.
  • Integrated memory devices, DRAM, ReRAM, FeRAM
  • Devices with 1D and 2D channels
  • Carbon micro- and nanoelectronics
  • Solid state devices for THz generation and detection
  • Magnetic micro- and nanostructures, spintronic devices
  • Superconducting micro- and nanodevices and structures
  • Devices for optoelectronics, photonics
  • Sensors, micro- and nanoelectromechanical systems (MEMS, NEMS, BioMEMS)
  • Device simulation and modeling

Technology and characterization of materials for micro- and nanoelectronics:

  • Si, SOI, SiGe, A3B5, A2B6
  • High-k dielectrics, low-k dielectrics
  • Metal films for device structures
  • 1D and 2D materials
  • Magnetic materials, nanomagnetics
  • Materials for optoelectronics and photovoltaic, metamaterials

Technologies and advanced equipment for micro- and nanoelectronics:

  • Lithography: immersion, EUV, electron and ion lithography, nanoimprint
  • Front-end of line (FEOL) processes in ULSI’s technology
  • Back-end of line (BEOL) processes in ULSI’s technology
  • 3D integration technologies
  • Technologies for 2D materials (graphene, MoS2, WS2, etc.)
  • Technologies for 1D structures (nanowires, nanotubes)
  • Technologies for MEMS and NEMS
  • Technologies for superconducting devices

Metrology:

  • In situ processes monitoring and control (end-point detection, process smart sensors)
  • Inspections, metrology, and characterization of micro- and nanostructures

Quantum informatics:

  • Quantum computers: theory and experiments
  • Quantum measurements
  • Quantum algorithms
  • Quantum communications
  • Quantum sensors