Scope:

Physics of micro- and nanodevices:

  • Scaling challenges and opportunities for nanodevices and ICs
  • Nanoscale transistors: CMOS FET, TFET, FeFET, SET, molecular transistors and switches, etc.
  • Integrated memory devices: DRAM, ReRAM, FeRAM
  • Devices with 1D and 2D channels
  • Carbon micro- and nanoelectronics
  • Devices for UHF electronics
  • Solid state devices for THz generation and detection
  • Magnetic micro- and nanostructures, spintronic devices
  • Forthcoming devices for neuromorphic systems
  • Devices for cryoelectronics
  • Devices and nanostructures for optoelectronics, photonics
  • Sensors, micro- and nanoelectromechanical systems (MEMS, NEMS, BioMEMS)
  • Modeling and simulation of nanoelectronics devices

Extended session. Physics of surfaces and interfaces:

  • Dynamics and self-assembly effects on surfaces
  • Phase transformations on surfaces and at interfaces
  • Surface diffusion and film growth
  • Electronic and optical properties of surfaces
  • Physics of atomic clusters on surfaces and interlayers at interfaces
  • Chemical reactions on surfaces and at interfaces
  • New experimental methods for surface investigation

Materials and heterostructures for micro-, optoelectronics, and power electronics:

  • Si, SOI, GOI, SiGe/Si, AIIIBV, AIIBVI, SiC, beta-Ga2O3
  • Diamond heterostructures
  • High-k and low-k dielectrics
  • Materials for ULSI interconnection systems
  • 1D and 2D materials
  • Magnetic materials, nanomagnetics
  • Materials for optoelectronics and photovoltaic, metamaterials
  • Nanocomposite materials for electronic devices

Physics of technological processes and advanced equipment for micro- and nanoelectronics:

  • Lithography: immersion, EUV, electron-beam and ion-beam lithography, nanoimprint
  • Front-end of line (FEOL) processes for ICs manufacturing
  • Back-end of line (BEOL) processes for ICs manufacturing
  • 3D integration technologies
  • Technologies for nanoelectronics based on 2D materials (graphene, MoS2, WS2, etc.)
  • Technologies for 1D structures manufacturing (nanowires, nanosheets, nanotubes)
  • Technologies for MEMS, NEMS, and BioMEMS
  • Technologies for superconducting devices

Metrology:

  • In situ technology processes monitoring and control (end-point detection, process smart sensors)
  • Inspections, metrology, and characterization of micro- and nanostructures

Extended session. Quantum technologies:

  • Quantum computing: theory and experiments
  • Quantum measurements
  • Quantum algorithms
  • Quantum communications
  • Quantum sensors