Symposium 'Quantum Informatics - 2012'
   The International Conference “Micro- and Nanoelectronics – 2020” (ICMNE-2020) with the Extended Session "Quantum Informatics" (QI-2020) will be held during October 5-9, 2020 at the park-hotel “Ershovo” in Zvenigorod, Moscow Region, Russia.
   It continues the series of the International Conferences "ICMNE-2003", "QI-2004", "ICMNE-2005", "QI-2005", "ICMNE-2007", "QI-2007", "ICMNE-2009", "QI-2009", "ICMNE-2012", "QI-2012", "ICMNE-2014", "QI-2014", "ICMNE-2016", and "QI-2016", "ICMNE-2018", and "QI-2018".
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General information


ATTENTION! Due to the COVID-19 pandemia and the uncertainty of the current situation the Organizing Committee makes a decision to change the Conference date to 2021, October 4-8.
Stay safe, and we hope to see you at our Conference in 2021.

   The International Conference “Micro- and Nanoelectronics – 2020” (ICMNE-2020) including the extended Session “Quantum Informatics” (QI-2020)  will be held on October 5-9, 2020 at the park-hotel “Ershovo”, Zvenigorod, Moscow Region, Russia. It continues the series of the All-Russian Conferences "MNE-1999", "MNE-2001", "QI-2002" and the International Conferences "ICMNE-2003", "QI-2004", "ICMNE-2005", "QI-2005", "ICMNE-2007", "QI-2007", "ICMNE-2009", "QI-2009", "ICMNE-2012", "QI-2012", "ICMNE-2014", "QI-2014", "ICMNE-2016" and "QI-2016", "ICMNE-2018" and "QI-2018".

   ICMNE is a biannual event covering the main fields of micro- and nanoelectronic technologies and device physics. ICMNE-2020 will be focused on recent progress in that area. The Conference will include the exhibition of equipment for micro- and nanoelectronics.


Physics of micro- and nanodevices:

  • Scaling challenges and opportunities for nanodevices
  • Nanoscale transistors: CMOS FET, TFET, SET, molecular transistors, molecular switches, etc.
  • Integrated memory devices, DRAM, ReRAM, FeRAM
  • Devices with 1D and 2D channels
  • Carbon micro- and nanoelectronics
  • Solid state devices for THz generation and detection
  • Magnetic micro- and nanostructures, spintronic devices
  • Superconducting micro- and nanodevices and structures
  • Devices for optoelectronics, photonics
  • Sensors, micro- and nanoelectromechanical systems (MEMS, NEMS, BioMEMS)
  • Device simulation and modeling

Technology and characterization of materials for micro- and nanoelectronics:

  • Si, SOI, SiGe, A3B5, A2B6
  • High-k dielectrics, low-k dielectrics
  • Metal films for device structures
  • 1D and 2D materials
  • Magnetic materials, nanomagnetics
  • Materials for optoelectronics and photovoltaic, metamaterials

Technologies and advanced equipment for micro- and nanoelectronics:

  • Lithography: immersion, EUV, electron and ion lithography, nanoimprint
  • Front-end of line (FEOL) processes in ULSI's technology
  • Back-end of line (BEOL) processes in ULSI's technology
  • 3D integration technologies
  • Technologies for 2D materials (graphene, MoS2, WS2, etc.)
  • Technologies for 1D structures (nanowires, nanotubes)
  • Technologies for MEMS and NEMS
  • Technologies for superconducting devices


  • In situ processes monitoring and control (end-point detection, process smart sensors)
  • Inspections, metrology, and characterization of micro- and nanostructures

Quantum informatics:

  • Quantum computers: theory and experiments
  • Quantum measurements
  • Quantum algorithms
  • Quantum communications

Organizers and Sponsors:

  • Valiev Institute of Physics and Technology of the Russian Academy of Sciences, Moscow, Russia
  • NIIME, Moscow, Russia
  • Russian Foundation for Basic Research, Moscow, Russia
  • Russian Academy of Sciences, Division of Nano- and Information Technologies, Russia
  • SPIE – The International Society for Optical Engineering
  • Rzhanov Institute of Semiconductor Physics of the Russian Academy of Sciences (the Siberian Branch), Novosibirsk, Russia
  • M.V. Lomonosov Moscow State University, Moscow, Russia
  • P.G. Demidov Yaroslavl State University, Yaroslavl, Russia
  • TechoInfo, Ltd., Wembley, UK
  • NIX Company, Moscow, Russia


   The working language of ICMNE-2020 is English.

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