Symposium 'Quantum Informatics - 2012'
   The 14th International Conference “Micro- and Nanoelectronics – 2021” (ICMNE-2021) with the Extended Session "Quantum Informatics" will be held during October 4-8, 2021 at the park-hotel “Ershovo” in Zvenigorod, Moscow Region, Russia.
   It continues the series of the International Conferences ICMNE-2003, QI-2004, ICMNE-2005, QI-2005, ICMNE-2007, QI-2007, ICMNE-2009, QI-2009, ICMNE-2012, QI-2012, ICMNE-2014, QI-2014, ICMNE-2016, QI-2016, ICMNE-2018, and QI-2018.
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Preliminary list of invited speakers

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   The 14th International Conference “Micro- and Nanoelectronics – 2021” (ICMNE-2021) including the extended Session “Quantum Informatics” will be held on October 4-8, 2021 at the park-hotel “Ershovo”, Zvenigorod, Moscow Region, Russia in a hybrid online/offline format. It continues the series of the All-Russian Conferences MNE-1999, MNE-2001, QI-2002 and the International Conferences ICMNE-2003, QI-2004, ICMNE-2005, QI-2005, ICMNE-2007, QI-2007, ICMNE-2009, QI-2009, ICMNE-2012, QI-2012, ICMNE-2014, QI-2014, ICMNE-2016, QI-2016, ICMNE-2018, and QI-2018.

   ICMNE is a biannual event covering the main fields of micro- and nanoelectronic technologies and device physics. ICMNE-2021 will be focused on recent progress in that area.

Scope:

Physics of micro- and nanodevices:

  • Scaling challenges and opportunities for nanodevices
  • Nanoscale transistors: CMOS FET, TFET, SET, molecular transistors, molecular switches, etc.
  • Integrated memory devices, DRAM, ReRAM, FeRAM
  • Devices with 1D and 2D channels
  • Carbon micro- and nanoelectronics
  • Solid state devices for THz generation and detection
  • Magnetic micro- and nanostructures, spintronic devices
  • Superconducting micro- and nanodevices and structures
  • Devices for optoelectronics, photonics
  • Sensors, micro- and nanoelectromechanical systems (MEMS, NEMS, BioMEMS)
  • Device simulation and modeling

Technology and characterization of materials for micro- and nanoelectronics:

  • Si, SOI, SiGe, A3B5, A2B6
  • High-k dielectrics, low-k dielectrics
  • Metal films for device structures
  • 1D and 2D materials
  • Magnetic materials, nanomagnetics
  • Materials for optoelectronics and photovoltaic, metamaterials

Technologies and advanced equipment for micro- and nanoelectronics:

  • Lithography: immersion, EUV, electron and ion lithography, nanoimprint
  • Front-end of line (FEOL) processes in ULSI's technology
  • Back-end of line (BEOL) processes in ULSI's technology
  • 3D integration technologies
  • Technologies for 2D materials (graphene, MoS2, WS2, etc.)
  • Technologies for 1D structures (nanowires, nanotubes)
  • Technologies for MEMS and NEMS
  • Technologies for superconducting devices

Metrology:

  • In situ processes monitoring and control (end-point detection, process smart sensors)
  • Inspections, metrology, and characterization of micro- and nanostructures

Quantum informatics:

  • Quantum computers: theory and experiments
  • Quantum measurements
  • Quantum algorithms
  • Quantum communications

Organizers and Sponsors:

  • Valiev Institute of Physics and Technology of the Russian Academy of Sciences, Moscow, Russia
  • NIIME, Moscow, Russia
  • Russian Foundation for Basic Research, Moscow, Russia
  • Russian Academy of Sciences, Division of Nano- and Information Technologies, Russia
  • SPIE – The International Society for Optical Engineering
  • Rzhanov Institute of Semiconductor Physics of the Russian Academy of Sciences (the Siberian Branch), Novosibirsk, Russia
  • M.V. Lomonosov Moscow State University, Moscow, Russia
  • P.G. Demidov Yaroslavl State University, Yaroslavl, Russia
  • TechoInfo, Ltd., Wembley, UK
  • NIX Company, Moscow, Russia

Language:

   The working language of ICMNE-2021 is English.






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